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Development of sample rotator for focused ion beam micro-nano machining system

Speckle 2023: VIII International Conference on Speckle Metrology Pub Date : 2024-03-04 DOI:10.1117/12.3014240
Hailin Guo, Siling Huang, Shiyan Zhao, Xu Zhang, Chaoxiang Xia, Ning Pei, Dasen Wang
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开发用于聚焦离子束微纳加工系统的样品旋转器
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Speckle 2023: VIII International Conference on Speckle Metrology
Speckle 2023: VIII International Conference on Speckle Metrology
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