Effect of Oxygen Flow Rate, Post-annealing Temperature, and Different Electrolyte Concentrations on WO3 Thin Films Deposited by DC Magnetron Sputtering For Electrochromic Applications

IF 2.2 4区工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC

Journal of Electronic Materials Pub Date : 2024-03-18 DOI:10.1007/s11664-024-11000-4

K. Naveen Kumar, G. V. Ashok Reddy, Sheik Abdul Sattar, R. Imran Jafri, R. Premkumar, M. Muthukrishnan, A. Asrar Ahamed, M. R. Meera, Nunna Guru Prakash, Ammar M. Tighezza, Tae Jo Ko

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Abstract

In this work, tungsten oxide (WO₃) films were deposited at room temperature and annealed for 2 h at 400°C. The electrochromic and electrochemical properties were studied for two different electrolytes. The films were deposited at different oxygen flow rates of 2, 4, and 6 standard cubic centimeters per minute (SCCM). X-ray diffraction analysis revealed structural characterization of amorphous and crystalline phases. UV-visible spectroscopy optical transmittance revealed 91% transmittance, and energy-dispersive x-ray spectroscopy (EDS) analysis revealed the absence of impurities and the presence of W and O. An electrochemical analyzer was used to characterize the deposited and annealed WO₃ films immersed in the two different electrolyte solutions (H₂SO₄ and LiClO₄ with oxygen flow rates ranging from 2 SCCM to 6 SCCM). It was found that the H₂SO₄ electrolyte of an annealed WO₃ thin film at 2 SCCM demonstrated high coloring efficiency of 50.18 cm²/C, and the LiClO₄ electrolyte of an annealed WO₃ thin film at 4 SCCM demonstrated high coloring efficiency of 20.06 cm²/C.

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氧气流速、退火后温度和不同电解质浓度对通过直流磁控溅射沉积的电致变色用 WO3 薄膜的影响

在这项工作中，氧化钨（WO3）薄膜在室温下沉积，并在 400°C 下退火 2 小时。研究了两种不同电解质的电致变色和电化学特性。薄膜是在 2、4 和 6 标准立方厘米/分钟（SCCM）的不同氧气流速下沉积的。X 射线衍射分析显示了无定形和晶体相的结构特征。使用电化学分析仪对浸入两种不同电解质溶液（H2SO4 和 LiClO4，氧气流速为 2 SCCM 至 6 SCCM）中的沉积和退火 WO3 薄膜进行了表征。结果发现，在 2 SCCM 条件下，退火 WO3 薄膜在 H2SO4 电解液中的着色效率高达 50.18 cm2/C，而在 4 SCCM 条件下，退火 WO3 薄膜在 LiClO4 电解液中的着色效率高达 20.06 cm2/C。

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来源期刊

Journal of Electronic Materials 工程技术-材料科学：综合

CiteScore

4.10

自引率

4.80%

发文量

693

审稿时长

3.8 months

期刊介绍： The Journal of Electronic Materials (JEM) reports monthly on the science and technology of electronic materials, while examining new applications for semiconductors, magnetic alloys, dielectrics, nanoscale materials, and photonic materials. The journal welcomes articles on methods for preparing and evaluating the chemical, physical, electronic, and optical properties of these materials. Specific areas of interest are materials for state-of-the-art transistors, nanotechnology, electronic packaging, detectors, emitters, metallization, superconductivity, and energy applications. Review papers on current topics enable individuals in the field of electronics to keep abreast of activities in areas peripheral to their own. JEM also selects papers from conferences such as the Electronic Materials Conference, the U.S. Workshop on the Physics and Chemistry of II-VI Materials, and the International Conference on Thermoelectrics. It benefits both specialists and non-specialists in the electronic materials field. A journal of The Minerals, Metals & Materials Society.