Quantification of aluminium and silicon-containing materials using Ag Lα X-rays

Abstract

In recent years, instrument manufacturers have been providing laboratory-based HAXPES (hard X-ray photoelectron spectroscopy) instruments that have monochromated silver Lα, chromium Kα and gallium Kα X-ray sources. To be more than a qualitative tool, two things are required: calibration of the signal intensity as a function of kinetic energy (spectrometer response function) and relative sensitivity factors. This is now possible because of routines being available to generate the spectrometer response functions for dual Al Kα/Ag Lα X-ray sources and the availability of Cant average matrix relative sensitivity factors (AMRSFs). However, to improve accuracy when using the Cant AMRSF care needs to be taken in the definition of the peak areas being used. This is because they need to include the total intrinsic signal that often extends beyond the main peak. This is a particular challenge when quantifying using the Al 1s peak generated with Ag Lα X-rays as some of the intrinsic signal overlaps with the Al KLL Auger peak. When materials include both aluminium and silicon atoms, the Si 2s and 2p peaks sit upon extended signals coming from the Al 2s and 2s peaks, respectively. Thus, quantification should be limited to using the main peak area, which necessitates different relative sensitivity factors (RSFs). Using polydimethylsiloxane (PDMS) and sapphire (Al₂O₃) as model systems, experimental RSFs have been determined for use with the main peaks for O 1s, Al 1s, Al2s Al 2p, Si 1s, Si 2s and Si 2p subshells normalized to the RSF of the carbon 1s main peak.