Review of the pressure sensor based on graphene and its derivatives

IF 2.6 4区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Microelectronic Engineering Pub Date : 2024-02-29 DOI:10.1016/j.mee.2024.112167

Yuwei Guo, Simei Zeng, Qi Liu, Jingye Sun, Mingqiang Zhu, Linan Li, Tao Deng

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引用次数: 0

Abstract

Pressure sensors are widely used in a variety of industrial automatic control environments and in everyday life, including production automatic control, aerospace, healthcare, electronic skin and many other industries. Different structural designs are suitable for different application scenarios. With the development of technology, the demand for high sensitivity and wide range pressure sensors is increasing. The appearance of graphene-based materials has pushed the performance of pressure sensors to new heights. In this paper, the research progress of pressure sensors in the past ten years based on graphene and its derivatives is deeply discussed. According to the classification of application directions based on different substrate structures, the current pressure sensors based on graphene and its derivatives are reviewed. Finally, the current development status of pressure sensing technology based on graphene and its derivatives is summarized, and the development prospect in this field is prospected.

Index Terms.

Pressure sensor, Graphene, Graphene derivatives.

Abstract Image

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基于石墨烯及其衍生物的压力传感器综述

压力传感器广泛应用于各种工业自动控制环境和日常生活中，包括生产自动控制、航空航天、医疗保健、电子皮肤和许多其他行业。不同的结构设计适用于不同的应用场景。随着科技的发展，人们对高灵敏度、宽量程压力传感器的需求越来越大。石墨烯基材料的出现将压力传感器的性能推向了新的高度。本文深入探讨了近十年来基于石墨烯及其衍生物的压力传感器的研究进展。根据不同基底结构的应用方向分类，综述了当前基于石墨烯及其衍生物的压力传感器。最后，总结了基于石墨烯及其衍生物的压力传感技术的发展现状，并展望了该领域的发展前景。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Microelectronic Engineering 工程技术-工程：电子与电气

CiteScore

5.30

自引率

4.30%

发文量

131

审稿时长

29 days

期刊介绍： Microelectronic Engineering is the premier nanoprocessing, and nanotechnology journal focusing on fabrication of electronic, photonic, bioelectronic, electromechanic and fluidic devices and systems, and their applications in the broad areas of electronics, photonics, energy, life sciences, and environment. It covers also the expanding interdisciplinary field of "more than Moore" and "beyond Moore" integrated nanoelectronics / photonics and micro-/nano-/bio-systems. Through its unique mixture of peer-reviewed articles, reviews, accelerated publications, short and Technical notes, and the latest research news on key developments, Microelectronic Engineering provides comprehensive coverage of this exciting, interdisciplinary and dynamic new field for researchers in academia and professionals in industry.