Highly Flexible and Sensitive Pressure Sensor: Fabrication of Porous PDMS/Graphene Composite via Laser Thermoforming

Dingyi Guo, Xiao Lei, Haobing Chen, Longju Yi, Yunfan Li, Yilin Zhao, Feng Liu, Gary J. Cheng
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Abstract

Flexible pressure sensors employing porous polymer materials are renowned for their superior sensing capabilities, attributed to the inherently low stiffness of porous polymers. The practical utilization of such sensors hinges on the development of a straightforward, cost-effective, and patternable method for preparing porous polymer materials. In this research, a novel laser thermoforming process is introduced to craft a porous Polydimethylsiloxane (PDMS) film, leveraging carbon black (CB) as an endothermic agent and glucose as a porogen. The resulting porous PDMS film serves as the foundation for a remarkably sensitive flexible piezoresistive sensor. Owing to the inherent flexibility endowed by the porous structure, the porous PDMS-based pressure sensor achieves a remarkable sensitivity of 109.4 kPa−1 within 0–200 Pa, an effective measurement span of 0–100 kPa, rapid response and recovery times of 79 and 55 ms, and impressive stability over 5000 cycles. The sensor's utility extends to applications such as human pulse monitoring, Morse coding, and robot claw sensing, underscoring its promise in the realm of flexible electronics. In summary, the laser thermoforming process realizes the one-step, economical, and patternable preparation of porous polymer materials, and introduces a novel avenue for the realization of high-performance flexible sensors based on thermally cured porous polymers.

Abstract Image

高柔性、高灵敏度压力传感器:通过激光热成型制造多孔 PDMS/石墨烯复合材料
采用多孔聚合物材料的柔性压力传感器以其卓越的传感能力而著称,这归功于多孔聚合物固有的低硬度。此类传感器的实际应用取决于能否开发出一种简单、经济、可模式化的方法来制备多孔聚合物材料。在这项研究中,采用了一种新型激光热成型工艺来制作多孔聚二甲基硅氧烷(PDMS)薄膜,利用炭黑(CB)作为内热剂,葡萄糖作为致孔剂。由此产生的多孔 PDMS 薄膜是灵敏度极高的柔性压阻传感器的基础。由于多孔结构具有固有的柔韧性,基于多孔 PDMS 的压力传感器在 0-200 Pa 范围内实现了 109.4 kPa-1 的高灵敏度,有效测量范围为 0-100 kPa,快速响应和恢复时间分别为 79 和 55 ms,并且在 5000 次循环中保持了令人印象深刻的稳定性。该传感器的实用性扩展到人体脉搏监测、莫尔斯编码和机器人爪子感应等应用,彰显了其在柔性电子领域的前景。总之,激光热成型工艺实现了多孔聚合物材料的一步制备、经济性和可模式化,为实现基于热固化多孔聚合物的高性能柔性传感器开辟了一条新途径。
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