A Radiofrequency Threshold Temperature Sensor Using a Hf0.5Zr0.5O2 Device and a Microacoustic Piezoelectric Resonant Sensor

IF 2.5 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Journal of Microelectromechanical Systems Pub Date : 2024-02-22 DOI:10.1109/JMEMS.2024.3364521

Onurcan Kaya;Luca Colombo;Pietro Simeoni;Benyamin Davaji;Matteo Rinaldi;Cristian Cassella

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引用次数: 0

Abstract

This article presents the first prototype of a novel threshold sensing system operating in the radiofrequency (RF) range, capable of passively detecting and recording instances of temperature violations with high sensitivity and without the need of DC-biased memory devices. The system comprises a microfabricated hafnium zirconium oxide (HZO) ferroelectric varactor, a microfabricated lithium niobate (LiNbO3) shear-horizontal (SH0) Lamb wave microacoustic resonator used as a temperature sensor, and an inductor. All components have been soldered onto a printed circuit board for testing and characterization. Through this threshold sensing system, we also provide the first demonstration of ferroelectric switching in a HZO varactor triggered exclusively by an RF signal without requiring any DC voltages. The findings reported in this paper offer a promising pathway for future RF passive tags leveraging micro- and nanosystems to implement a programmable threshold sensing functionality with high sensitivity and with embedded memory capabilities. [2023-0215]

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使用 Hf0.5Zr0.5O2 器件和微声压电谐振传感器的射频阈值温度传感器

本文介绍了在射频（RF）范围内工作的新型阈值传感系统的第一个原型，该系统能够以高灵敏度被动检测和记录违反温度规定的情况，且无需使用直流偏压存储器件。该系统由一个微细加工的氧化铪锆（HZO）铁电变容器、一个微细加工的用作温度传感器的铌酸锂（LiNbO3）剪切-水平（SH0）Lamb 波微声谐振器和一个电感器组成。所有元件都已焊接到印刷电路板上，以便进行测试和表征。通过这个阈值传感系统，我们还首次展示了完全由射频信号触发的 HZO 变容器中的铁电开关，而无需任何直流电压。本文报告的研究结果为未来利用微型和纳米系统实现具有高灵敏度和嵌入式存储器功能的可编程阈值传感功能的射频无源标签提供了一条前景广阔的途径。[2023-0215]

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Journal of Microelectromechanical Systems 工程技术-工程：电子与电气

CiteScore

6.20

自引率

7.40%

发文量

115

审稿时长

7.5 months

期刊介绍： The topics of interest include, but are not limited to: devices ranging in size from microns to millimeters, IC-compatible fabrication techniques, other fabrication techniques, measurement of micro phenomena, theoretical results, new materials and designs, micro actuators, micro robots, micro batteries, bearings, wear, reliability, electrical interconnections, micro telemanipulation, and standards appropriate to MEMS. Application examples and application oriented devices in fluidics, optics, bio-medical engineering, etc., are also of central interest.