Surface acoustic wave spectroscopy for non-destructive coating and bulk characterization at temperatures up to 600°C enabled by piezoelectric aluminum nitride coated sensor

IF 16.4 1区 化学 Q1 CHEMISTRY, MULTIDISCIPLINARY
Stefan Makowski, Martin Zawischa, Dieter Schneider, Stephan Barth, Sebastian Schettler, Thanh-Tung Hoang, Hagen Bartzsch, Martina Zimmermann
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Abstract

Surface acoustic wave spectroscopy has been established as non-destructive and fast method for characterization of mechanical properties of surfaces and bulk materials in both research and industry. The present work shows that by application of a novel and robust aluminum nitride (AlN) coated piezoelectric contact sensor the advantages of the method can be extended from room temperature to at least 600°C. An overview of sensor concepts and applications of the method is discussed first, followed by theoretical and practical considerations for design and coating of a novel temperature stable contact sensor. After fabrication of such a sensor using magnetron sputtering, it was tested in a modified surface acoustic wave spectroscopy setup with an incorporated heating table concerning signal amplitude and frequency range. The AlN coated sensor was found to perform well up to 600°C, with temperature limited by the specification of the heating table. At room temperature, performance was acceptable when compared with a conventional contact sensor using a PVDF piezoelectric foil. Application of the high temperature capabilities of the setup was demonstrated by measuring temperature stability of hydrogen-free amorphous carbon coatings (a-C and ta-C) depending on their sp3 carbon ratio. In another example, high precision temperature dependent measurement of Young's modulus for ultrasonic fatigue test specimen was taken, achieving an accuracy better than 1%. Use of the developed sensor opens up new possibilities in material science for in situ study of temperature depending mechanical properties for coatings and surfaces.
利用氮化铝压电涂层传感器,在高达 600°C 的温度条件下利用表面声波光谱进行无损涂层和块体表征
在研究和工业领域,表面声波光谱法已成为表征表面和块体材料力学特性的无损、快速方法。本研究表明,通过应用新型、坚固的氮化铝(AlN)涂层压电接触传感器,该方法的优势可以从室温扩展到至少 600°C。首先概述了传感器概念和该方法的应用,然后讨论了设计和涂层新型温度稳定接触式传感器的理论和实际考虑因素。在利用磁控溅射技术制造出这种传感器后,我们在改进的表面声波光谱仪装置中对其进行了测试,该装置带有一个有关信号振幅和频率范围的加热台。结果表明,AlN 涂层传感器在高达 600°C 的温度下性能良好,但温度受限于加热台的规格。在室温下,与使用 PVDF 压电箔的传统接触式传感器相比,其性能是可以接受的。通过测量无氢无定形碳涂层(a-C 和 ta-C)的温度稳定性(取决于其 sp3 碳比例),证明了该装置的高温应用能力。在另一个例子中,对超声波疲劳测试样本的杨氏模量进行了随温度变化的高精度测量,精度优于 1%。所开发传感器的使用为材料科学领域现场研究涂层和表面随温度变化的机械性能提供了新的可能性。
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来源期刊
Accounts of Chemical Research
Accounts of Chemical Research 化学-化学综合
CiteScore
31.40
自引率
1.10%
发文量
312
审稿时长
2 months
期刊介绍: Accounts of Chemical Research presents short, concise and critical articles offering easy-to-read overviews of basic research and applications in all areas of chemistry and biochemistry. These short reviews focus on research from the author’s own laboratory and are designed to teach the reader about a research project. In addition, Accounts of Chemical Research publishes commentaries that give an informed opinion on a current research problem. Special Issues online are devoted to a single topic of unusual activity and significance. Accounts of Chemical Research replaces the traditional article abstract with an article "Conspectus." These entries synopsize the research affording the reader a closer look at the content and significance of an article. Through this provision of a more detailed description of the article contents, the Conspectus enhances the article's discoverability by search engines and the exposure for the research.
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