Study on characteristics of microchannel jet for showerhead in different fluid regimes based on hybrid NS-DSMC methodology

IF 2.3 4区工程技术 Q2 INSTRUMENTS & INSTRUMENTATION

Microfluidics and Nanofluidics Pub Date : 2024-02-15 DOI:10.1007/s10404-023-02705-9

Wansuo Liu, Xiangji Yue, Zeng Lin

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Abstract

The uniformity of the deposition in the plasma-enhanced chemical vapor deposition (PECVD) process is greatly influenced by the uniform effect of the microchannels in the showerhead. Most of the previous studies on showerheads have primarily focused on the axial-direction of microchannels. However, there is a lack of comparative studies on the influence of radial changes and different flow regimes on the flow characteristics of microchannels. In this paper, we utilized the coupling of the Navier–Stokes and Direct Simulation Monte Carlo (NS-DSMC) methods to compare the differences between expansion type microchannels and equal-diameter type microchannels in the slip and transition regimes. The results indicate that in the slip flow regime, the microchannel of equal diameter exhibits a stronger jet compared to the expansion type. However, this situation reverses as the slip flow regime transitions to the transition regime. This reflects the influence of the flow regime on the characteristics of the microchannel and the potential of the combined type to enhance deposition uniformity.

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基于混合 NS-DSMC 方法的不同流体状态下淋浴喷头微通道射流特性研究

等离子体增强化学气相沉积（PECVD）工艺中沉积的均匀性在很大程度上受到喷淋头中微通道均匀效果的影响。以往对喷淋头的研究大多主要集中在微通道的轴向方向。然而，关于径向变化和不同流态对微通道流动特性影响的比较研究还很缺乏。本文利用纳维-斯托克斯和直接模拟蒙特卡罗（NS-DSMC）方法的耦合，比较了膨胀型微通道和等径型微通道在滑移和过渡状态下的差异。结果表明，在滑移流动状态下，与膨胀型微通道相比，等直径微通道表现出更强的射流。然而，当滑移流态过渡到过渡流态时，这种情况发生了逆转。这反映了流态对微通道特性的影响，以及组合型微通道提高沉积均匀性的潜力。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Microfluidics and Nanofluidics 工程技术-纳米科技

CiteScore

4.80

自引率

3.60%

发文量

审稿时长

2 months

期刊介绍： Microfluidics and Nanofluidics is an international peer-reviewed journal that aims to publish papers in all aspects of microfluidics, nanofluidics and lab-on-a-chip science and technology. The objectives of the journal are to (1) provide an overview of the current state of the research and development in microfluidics, nanofluidics and lab-on-a-chip devices, (2) improve the fundamental understanding of microfluidic and nanofluidic phenomena, and (3) discuss applications of microfluidics, nanofluidics and lab-on-a-chip devices. Topics covered in this journal include: 1.000 Fundamental principles of micro- and nanoscale phenomena like, flow, mass transport and reactions 3.000 Theoretical models and numerical simulation with experimental and/or analytical proof 4.000 Novel measurement & characterization technologies 5.000 Devices (actuators and sensors) 6.000 New unit-operations for dedicated microfluidic platforms 7.000 Lab-on-a-Chip applications 8.000 Microfabrication technologies and materials Please note, Microfluidics and Nanofluidics does not publish manuscripts studying pure microscale heat transfer since there are many journals that cover this field of research (Journal of Heat Transfer, Journal of Heat and Mass Transfer, Journal of Heat and Fluid Flow, etc.).