Development of PMUT-Based High Sensitivity Gas Flow Sensor

IF 2.5 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Journal of Microelectromechanical Systems Pub Date : 2023-12-01 DOI:10.1109/JMEMS.2023.3334497

Tapio Pernu;Teuvo Sillanpää;Cyril Baby Karuthedath;Abhilash Thanniyil Sebastian

引用次数: 0

Abstract

Piezoelectric micromachined ultrasound transducers (PMUTs) and a high sensitivity PMUT-based gas flowmeter were designed, fabricated and characterised. In this work a single side measurement geometry is introduced for a simple PMUT assembly and enabling high sensitivity for the low flowrate measurement. While PMUT-based gas flow sensors of previous work serve higher flowrate ranges, the advantage of our system is that its novel sensor and measurement geometry is designed specifically for low flow rates to ensure high sensitivity in the low-flow domain. The characterised flowmeter measurement range is ±50 sccm with a non-linearity error of 0.015%. A typical flow error within the measurement range of ±50 sccm is ±0.7% from the flow reading and ±0.2% from the full-scale (±50 sccm) flowrate. [2023-0162]

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开发基于 PMUT 的高灵敏度气体流量传感器

我们设计、制造并鉴定了压电微机械超声换能器（PMUT）和基于 PMUT 的高灵敏度气体流量计。在这项工作中，采用了单侧测量几何形状，以简化 PMUT 的装配，从而实现低流量测量的高灵敏度。以前的工作中，基于 PMUT 的气体流量传感器适用于较高的流量范围，而我们系统的优势在于其新型传感器和测量几何形状是专为低流量设计的，可确保低流量领域的高灵敏度。流量计的测量范围为 ±50 sccm，非线性误差为 0.015%。在 ±50 sccm 的测量范围内，典型的流量误差为流量读数的 ±0.7% 和满量程（±50 sccm）流量的 ±0.2%。[2023-0162]

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Journal of Microelectromechanical Systems 工程技术-工程：电子与电气

CiteScore

6.20

自引率

7.40%

发文量

115

审稿时长

7.5 months

期刊介绍： The topics of interest include, but are not limited to: devices ranging in size from microns to millimeters, IC-compatible fabrication techniques, other fabrication techniques, measurement of micro phenomena, theoretical results, new materials and designs, micro actuators, micro robots, micro batteries, bearings, wear, reliability, electrical interconnections, micro telemanipulation, and standards appropriate to MEMS. Application examples and application oriented devices in fluidics, optics, bio-medical engineering, etc., are also of central interest.