Monolithically Integrated 3D Atomic Chip for Quantum Optical Magnetometry

IF 2.5 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC
Ziji Wang;Junming Wu;Gong Sun;Jintang Shang
{"title":"Monolithically Integrated 3D Atomic Chip for Quantum Optical Magnetometry","authors":"Ziji Wang;Junming Wu;Gong Sun;Jintang Shang","doi":"10.1109/JMEMS.2023.3337513","DOIUrl":null,"url":null,"abstract":"A monolithically integrated 3D atomic chip for weak magnetic field detection is presented in this work. A 14.8 ohm MEMS thin film non-magnetic micro heater is monolithically integrated onto a micro spherical alkali vapor cell to realize on-chip atomic density control. Both magnetic and thermal characteristics of the non-magnetic heater are analyzed theoretically. Based on the heater-integrated atomic chip, a chip-scale scalar atomic magnetometer is realized and tested in a magnetic shield. Effect of heating noise suppression methods including high frequency heating, noise-shifting heating and high precision feedback control on magnetometer performance is experimentally analyzed. By further analyzing and eliminating glitch noise in output signal, magnetic noise floor of the constructed device reduced by over 88 %. The proposed atomic chip is especially advantageous for future low-cost and high integration quantum optical magnetometry. [2023-0152]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"33 1","pages":"102-109"},"PeriodicalIF":2.5000,"publicationDate":"2023-12-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Microelectromechanical Systems","FirstCategoryId":"5","ListUrlMain":"https://ieeexplore.ieee.org/document/10342695/","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0

Abstract

A monolithically integrated 3D atomic chip for weak magnetic field detection is presented in this work. A 14.8 ohm MEMS thin film non-magnetic micro heater is monolithically integrated onto a micro spherical alkali vapor cell to realize on-chip atomic density control. Both magnetic and thermal characteristics of the non-magnetic heater are analyzed theoretically. Based on the heater-integrated atomic chip, a chip-scale scalar atomic magnetometer is realized and tested in a magnetic shield. Effect of heating noise suppression methods including high frequency heating, noise-shifting heating and high precision feedback control on magnetometer performance is experimentally analyzed. By further analyzing and eliminating glitch noise in output signal, magnetic noise floor of the constructed device reduced by over 88 %. The proposed atomic chip is especially advantageous for future low-cost and high integration quantum optical magnetometry. [2023-0152]
用于量子光学磁力测量的单片集成三维原子芯片
本研究提出了一种用于弱磁场检测的单片集成三维原子芯片。一个 14.8 欧姆的 MEMS 薄膜非磁性微加热器被单片集成到一个微球形碱蒸气电池上,以实现片上原子密度控制。理论分析了非磁性加热器的磁特性和热特性。基于集成加热器的原子芯片,实现了芯片级标量原子磁力计,并在磁屏蔽中进行了测试。实验分析了高频加热、噪声偏移加热和高精度反馈控制等加热噪声抑制方法对磁强计性能的影响。通过进一步分析和消除输出信号中的闪变噪声,所构建设备的磁噪声本底降低了 88% 以上。所提出的原子芯片对于未来的低成本、高集成度量子光学磁强计特别有利。[2023-0152]
本文章由计算机程序翻译,如有差异,请以英文原文为准。
求助全文
约1分钟内获得全文 求助全文
来源期刊
Journal of Microelectromechanical Systems
Journal of Microelectromechanical Systems 工程技术-工程:电子与电气
CiteScore
6.20
自引率
7.40%
发文量
115
审稿时长
7.5 months
期刊介绍: The topics of interest include, but are not limited to: devices ranging in size from microns to millimeters, IC-compatible fabrication techniques, other fabrication techniques, measurement of micro phenomena, theoretical results, new materials and designs, micro actuators, micro robots, micro batteries, bearings, wear, reliability, electrical interconnections, micro telemanipulation, and standards appropriate to MEMS. Application examples and application oriented devices in fluidics, optics, bio-medical engineering, etc., are also of central interest.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信