Sen Sun, Wenyu Jiang, Qinxin Liu, Yueyong Jiang, Tianyi Zhu, Jie Hu, Honglian Song, Zheng Yang, Xinfeng Hui, Yuanxia Lao
{"title":"Suppression of phase segregations in Ge–Fe–Co–Ni–Mn films by high-entropy effect","authors":"Sen Sun, Wenyu Jiang, Qinxin Liu, Yueyong Jiang, Tianyi Zhu, Jie Hu, Honglian Song, Zheng Yang, Xinfeng Hui, Yuanxia Lao","doi":"10.1116/6.0003164","DOIUrl":null,"url":null,"abstract":"Fe–Co–Ni–Mn films doped with different concentrations of Ge were prepared on the Si substrates by using radio frequency magnetron sputtering. Transmission electron microscopy (with an energy dispersive x-ray spectrometer) and an x-ray diffractometer were used to systematically study the microstructure evolution of the Fe–Co–Ni–Mn–Ge films. The results indicate that the Fe–Co–Ni–Mn films doped with a large amount of Ge show significant element segregation after rapid high-temperature annealing. However, with the decrease in the doping amount of Ge to approximately equal molar ratio with magnetic elements, Ge and magnetic elements achieve perfect mutual dissolution at the same annealing conditions, forming single-phase solid solution. Electrical transport tests suggest that its electrical property is close to semiconductors. The mechanism of enhanced mutual solubility between semiconductor elements and magnetic elements is discussed in detail.","PeriodicalId":509398,"journal":{"name":"Journal of Vacuum Science & Technology A","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2024-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Vacuum Science & Technology A","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1116/6.0003164","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Fe–Co–Ni–Mn films doped with different concentrations of Ge were prepared on the Si substrates by using radio frequency magnetron sputtering. Transmission electron microscopy (with an energy dispersive x-ray spectrometer) and an x-ray diffractometer were used to systematically study the microstructure evolution of the Fe–Co–Ni–Mn–Ge films. The results indicate that the Fe–Co–Ni–Mn films doped with a large amount of Ge show significant element segregation after rapid high-temperature annealing. However, with the decrease in the doping amount of Ge to approximately equal molar ratio with magnetic elements, Ge and magnetic elements achieve perfect mutual dissolution at the same annealing conditions, forming single-phase solid solution. Electrical transport tests suggest that its electrical property is close to semiconductors. The mechanism of enhanced mutual solubility between semiconductor elements and magnetic elements is discussed in detail.
利用射频磁控溅射技术在硅基底上制备了掺杂不同浓度 Ge 的铁-铜-镍-锰薄膜。使用透射电子显微镜(带能量色散 X 射线光谱仪)和 X 射线衍射仪系统地研究了铁-铜-镍-锰-锗薄膜的微观结构演变。结果表明,掺杂了大量 Ge 的铁-铜-镍-锰薄膜在快速高温退火后出现了明显的元素偏析。然而,随着 Ge 掺杂量减少到与磁性元素的摩尔比大致相等,在相同的退火条件下,Ge 和磁性元素实现了完美的相互溶解,形成了单相固溶体。电输运测试表明,其电性能接近半导体。本文详细讨论了半导体元素与磁性元素之间互溶性增强的机理。