Superconducting X-ray Sensors for Tomography of Microelectronics

Abstract

The high energy-resolving power of superconducting x-ray detectors reduces unwanted x-ray backgrounds, uses x-ray photons efficiently, and allows for discrimination among multiple chemical elements in a sample. This article discusses the challenges of analyzing the internal structure and composition of integrated circuits, and how 3D imaging can benefit manufacturers and researchers. It covers the development of superconducting x-ray sensors, their advantages over traditional sensors, potential applications, and focus areas for future work to develop this technology.