Temperature drift suppression for micro-electro-mechanical system gyroscope based on vibrational-displacement control with harmonic amplitude ratio

IF 1.5 4区材料科学 Q4 MATERIALS SCIENCE, MULTIDISCIPLINARY

Micro & Nano Letters Pub Date : 2024-01-03 DOI:10.1049/mna2.12187

Feng Bu, Rui Feng, Shuwen Guo, Ming Zhou, Yiwang Wang, Feng Wang

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Abstract

Micro-electro-mechanical system gyroscope detection output is susceptible to drift due to ambient temperature variations. Furthermore, the drive-mode vibration amplitude is affected by the signal pickup circuit and structural parameters, which significantly influence the temperature drift of the bias and scale factor (SF). This study proposes a vibration amplitude control method based on harmonic amplitude sideband-ratio (SBR), namely SBR-AGC, which characterizes the vibration amplitude using the harmonic amplitude ratio of the vibrational electrical signal. The constancy of vibration amplitude is maintained via closed-loop control to suppress bias and SF temperature drift. The experimental results on cobweb-like disk resonator gyroscope reveal that the temperature coefficient of bias in the SBR-AGC mode lies within −20 to 60°C and decreases by 36%, and the temperature coefficient of the SF lies within −10 to 50°C and decreases by 49.7%. Therefore, the environmental adaptability of the gyroscope is effectively improved.

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基于谐波振幅比振动位移控制的微机电系统陀螺仪温度漂移抑制技术

微机电系统陀螺仪的检测输出易受环境温度变化的影响而发生漂移。此外，驱动模式的振动幅度会受到信号拾取电路和结构参数的影响，从而对偏置和比例因子（SF）的温度漂移产生重大影响。本研究提出了一种基于谐波振幅边带比（SBR）的振动振幅控制方法，即 SBR-AGC，它利用振动电信号的谐波振幅比来表征振动振幅。通过闭环控制来抑制偏差和 SF 温度漂移，从而保持振动振幅的恒定性。蛛网状圆盘谐振器陀螺仪的实验结果表明，在 SBR-AGC 模式下，偏压的温度系数在 -20 至 60°C 范围内下降了 36%，而 SF 的温度系数在 -10 至 50°C 范围内下降了 49.7%。因此，陀螺仪的环境适应性得到了有效改善。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Micro & Nano Letters 工程技术-材料科学：综合

CiteScore

3.30

自引率

0.00%

发文量

审稿时长

2.8 months

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