Design and Analysis of MEMS Pressure Sensor based on various principles of Microcantilever beam.

Abstract

In this paper, we have used COMSOL Multiphysics for the design and simulation of three different micro cantilever configurations. These micro cantilevers are analyzed using finite element analysis (FEM) to understand their mechanical behavior, sensitivity, and non-linear characteristics. The goal of the research is to identify the most suitable micro cantilever design for integration with an electro-osmotic pressure sensor. This integrated system is intended to measure variations in glucose concentration levels with accuracy and efficiency, with potential applications in glucose monitoring and biomedical fields. The sensitivity of the microcantilever is reported as 0.10e-7. The stress value is given as 1.64. A change in resistance of 0.00011 Ω·μm is mentioned. The reported output voltage is 0.15 μV. This voltage is likely generated by the microcantilever in response to the changes in resistance, which are in turn caused by variations in glucose concentration. The gauge factor is given as 0.04. The gauge factor is a measure of the sensitivity of a strain gauge (in this case, the microcantilever) and is often used to relate the mechanical strain (stress) to the electrical resistance change. These parameters provide insights into the performance of the microcantilever-based glucose sensor and its ability to detect glucose concentration variations. The small output voltage indicates the need for sensitive detection and measurement equipment to utilize the sensor effectively.