{"title":"HAXPES: Inelastic background for characterization of nanostructured materials","authors":"Sven Tougaard","doi":"10.1002/sia.7273","DOIUrl":null,"url":null,"abstract":"Analysis of the spectrum of inelastically scattered electrons in XPS has been used for decades to determine the structure of materials on the nanoscale. Using the higher photon energies available in HAXPES, the method was recently shown to determine structures rather accurately with a more than 100 nm probing depth. In this paper, these HAXPES applications are briefly reviewed. Only two parameters are required for the analysis, namely, the inelastic mean free path and the cross section for inelastic electron scattering. We also discuss in detail how these parameters are best selected.","PeriodicalId":1,"journal":{"name":"Accounts of Chemical Research","volume":null,"pages":null},"PeriodicalIF":16.4000,"publicationDate":"2023-11-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Accounts of Chemical Research","FirstCategoryId":"92","ListUrlMain":"https://doi.org/10.1002/sia.7273","RegionNum":1,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"CHEMISTRY, MULTIDISCIPLINARY","Score":null,"Total":0}
引用次数: 0
Abstract
Analysis of the spectrum of inelastically scattered electrons in XPS has been used for decades to determine the structure of materials on the nanoscale. Using the higher photon energies available in HAXPES, the method was recently shown to determine structures rather accurately with a more than 100 nm probing depth. In this paper, these HAXPES applications are briefly reviewed. Only two parameters are required for the analysis, namely, the inelastic mean free path and the cross section for inelastic electron scattering. We also discuss in detail how these parameters are best selected.
期刊介绍:
Accounts of Chemical Research presents short, concise and critical articles offering easy-to-read overviews of basic research and applications in all areas of chemistry and biochemistry. These short reviews focus on research from the author’s own laboratory and are designed to teach the reader about a research project. In addition, Accounts of Chemical Research publishes commentaries that give an informed opinion on a current research problem. Special Issues online are devoted to a single topic of unusual activity and significance.
Accounts of Chemical Research replaces the traditional article abstract with an article "Conspectus." These entries synopsize the research affording the reader a closer look at the content and significance of an article. Through this provision of a more detailed description of the article contents, the Conspectus enhances the article's discoverability by search engines and the exposure for the research.