S. V. Zaitsev, E. Yu. Zykova, E. I. Rau, A. A. Tatarintsev, V. A. Kiselevskii
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引用次数: 0
Abstract
New possibilities for the mode of detecting backscattered electrons in a scanning electron microscope (SEM) are presented. The technique for determining the chemical composition of the probed area of the sample using the precalibrated scale of the SEM’s gray screen has been further developed. Simple relationships are presented for practical application in finding the thicknesses of thin films on a massive substrate. The parameters of the double layer of the film nanostructure on the substrate are determined, that is, depth and thickness of subsurface fragments of the microobject. A technique is proposed for measuring the surface potential of negatively charged dielectric samples upon irradiation with medium-energy electrons.
期刊介绍：
Instruments and Experimental Techniques is an international peer reviewed journal that publishes reviews describing advanced methods for physical measurements and techniques and original articles that present techniques for physical measurements, principles of operation, design, methods of application, and analysis of the operation of physical instruments used in all fields of experimental physics and when conducting measurements using physical methods and instruments in astronomy, natural sciences, chemistry, biology, medicine, and ecology.
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