Tactile sensor with microcantilevers embedded in fluoroelastomer/PDMS for physical and chemical resistance

IF 0.5 4区工程技术 Q4 ENGINEERING, ELECTRICAL & ELECTRONIC

Electronics and Communications in Japan Pub Date : 2022-08-05 DOI:10.1002/ecj.12369

Yuji Takahashi, Takumi Takahashi, Takashi Abe, Haruo Noma, Masayuki Sohgawa

引用次数: 0

Abstract

This paper addresses physical and chemical resistance evaluation of tactile sensors. We have developed cantilevertype MEMS tactile sensors embedded in the elastomer. In this work, we used a combination of silicone elastomer with excellent mechanical properties and fluoroelastomer with excellent chemical resistance. As a new embedding method for the sensor, we devised a method of embedding with PDMS with low creep and coating with a fluoroelastomer for surface protection. We further performed three evaluations to demonstrate the physical and chemical resistance of sensors. Consequently, using the devised method, we have demonstrated that the sensor with both physical and chemical resistance are feasible.

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触觉传感器与微悬臂嵌入氟弹性体/PDMS的物理和耐化学性

本文讨论了触觉传感器的物理耐化学性评价。我们已经开发了悬臂式MEMS触觉传感器嵌入弹性体。在这项工作中，我们使用了具有优异机械性能的有机硅弹性体和具有优异耐化学性的氟弹性体的组合。本文设计了一种低蠕变PDMS包埋和氟弹性体包埋的新型传感器包埋方法。我们进一步进行了三次评估，以证明传感器的物理和化学抗性。因此，使用所设计的方法，我们已经证明了传感器具有物理和化学抗性是可行的。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Electronics and Communications in Japan 工程技术-工程：电子与电气

CiteScore

0.60

自引率

0.00%

发文量

审稿时长

6-12 weeks

期刊介绍： Electronics and Communications in Japan (ECJ) publishes papers translated from the Transactions of the Institute of Electrical Engineers of Japan 12 times per year as an official journal of the Institute of Electrical Engineers of Japan (IEEJ). ECJ aims to provide world-class researches in highly diverse and sophisticated areas of Electrical and Electronic Engineering as well as in related disciplines with emphasis on electronic circuits, controls and communications. ECJ focuses on the following fields: - Electronic theory and circuits, - Control theory, - Communications, - Cryptography, - Biomedical fields, - Surveillance, - Robotics, - Sensors and actuators, - Micromachines, - Image analysis and signal analysis, - New materials. For works related to the science, technology, and applications of electric power, please refer to the sister journal Electrical Engineering in Japan (EEJ).