Automated Algorithm of Die Filter for PFA Sampling

Abstract

Abstract The goal of this project is to develop an automated algorithm of die filter to minimize the number of dies for PFA engineers to review and to confirm before PFA submission. This can reduce the workload of PFA engineers so that the PFA engineers can focus their investigations on few wafers and dies and thus the PFA job submission can be more efficient and accurate. The number, type, and location of dies for PFA sampling can be automatically given by following the rules set by PFA engineers.