Energy beam-based direct and assisted polishing techniques for diamond: A review

IF 16.1 1区工程技术 Q1 ENGINEERING, MANUFACTURING

International Journal of Extreme Manufacturing Pub Date : 2023-10-10 DOI:10.1088/2631-7990/acfd67

Zhuo Li, Feng Jiang, Zhengyi Jiang, Zige Tian, Tian Qiu, Tao Zhang, Qiuling Wen, Xizhao Lu, Jing Lu, Hui Huang

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引用次数: 0

Abstract

Abstract Diamond is a highly valuable material with diverse industrial applications, particularly in the fields of semiconductor, optics, and high-power electronics. However, its high hardness and chemical stability make it difficult to realize high-efficiency and ultra-low damage machining of diamond. To address these challenges, several polishing methods have been developed for both single crystal diamond (SCD) and polycrystalline diamond (PCD), including mechanical, chemical, laser, and ion beam processing methods. In this review, the characteristics and application scope of various polishing technologies for SCD and PCD are highlighted. Specifically, various energy beam-based direct and assisted polishing technologies, such as laser polishing, ion beam polishing, plasma-assisted polishing, and laser-assisted polishing, are summarized. The current research progress, material removal mechanism, and influencing factors of each polishing technology are analyzed. Although some of these methods can achieve high material removal rates or reduce surface roughness, no single method can meet all the requirements. Finally, the future development prospects and application directions of different polishing technologies are presented.

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基于能量束的金刚石直接和辅助抛光技术综述

金刚石是一种极具价值的材料，具有多种工业用途，特别是在半导体、光学和大功率电子领域。然而，金刚石的高硬度和化学稳定性使其难以实现高效、超低损伤加工。为了解决这些挑战，针对单晶金刚石(SCD)和多晶金刚石(PCD)开发了几种抛光方法，包括机械、化学、激光和离子束加工方法。本文综述了SCD和PCD各种抛光技术的特点和应用范围。详细介绍了激光抛光、离子束抛光、等离子体辅助抛光、激光辅助抛光等基于能量束的直接抛光和辅助抛光技术。分析了各种抛光技术的研究现状、材料去除机理及影响因素。虽然其中一些方法可以实现高材料去除率或降低表面粗糙度，但没有一种方法可以满足所有要求。最后，对不同抛光技术的发展前景和应用方向进行了展望。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

International Journal of Extreme Manufacturing Engineering-Industrial and Manufacturing Engineering

CiteScore

17.70

自引率

6.10%

发文量

审稿时长

12 weeks

期刊介绍： The International Journal of Extreme Manufacturing (IJEM) focuses on publishing original articles and reviews related to the science and technology of manufacturing functional devices and systems with extreme dimensions and/or extreme functionalities. The journal covers a wide range of topics, from fundamental science to cutting-edge technologies that push the boundaries of currently known theories, methods, scales, environments, and performance. Extreme manufacturing encompasses various aspects such as manufacturing with extremely high energy density, ultrahigh precision, extremely small spatial and temporal scales, extremely intensive fields, and giant systems with extreme complexity and several factors. It encompasses multiple disciplines, including machinery, materials, optics, physics, chemistry, mechanics, and mathematics. The journal is interested in theories, processes, metrology, characterization, equipment, conditions, and system integration in extreme manufacturing. Additionally, it covers materials, structures, and devices with extreme functionalities.