Integrated heterodyne laser Doppler vibrometer based on stress-optic frequency shift in silicon nitride

IF 15.7 Q1 OPTICS
Adam Raptakis, Lefteris Gounaridis, Jörn P. Epping, Thi Lan Anh Tran, Thomas Aukes, Moritz Kleinert, Madeleine Weigel, Marco Wolfer, Alexander Draebenstedt, Christos Tsokos, Panos Groumas, Efstathios Andrianopoulos, Nikos Lyras, Dimitrios Nikolaidis, Elias Mylonas, Nikolaos Baxevanakis, Roberto Pessina, Erik Schreuder, Matthijn Dekkers, Volker Seyfried, Norbert Keil, René G. Heideman, Hercules Avramopoulos, Christos Kouloumentas
{"title":"Integrated heterodyne laser Doppler vibrometer based on stress-optic frequency shift in silicon nitride","authors":"Adam Raptakis, Lefteris Gounaridis, Jörn P. Epping, Thi Lan Anh Tran, Thomas Aukes, Moritz Kleinert, Madeleine Weigel, Marco Wolfer, Alexander Draebenstedt, Christos Tsokos, Panos Groumas, Efstathios Andrianopoulos, Nikos Lyras, Dimitrios Nikolaidis, Elias Mylonas, Nikolaos Baxevanakis, Roberto Pessina, Erik Schreuder, Matthijn Dekkers, Volker Seyfried, Norbert Keil, René G. Heideman, Hercules Avramopoulos, Christos Kouloumentas","doi":"10.1186/s43074-023-00105-4","DOIUrl":null,"url":null,"abstract":"Abstract We demonstrate a compact heterodyne Laser Doppler Vibrometer (LDV) based on the realization of optical frequency shift in the silicon nitride photonic integration platform (TriPleX). We theoretically study, and experimentally evaluate two different photonic integrated optical frequency shifters (OFSs), utilizing serrodyne and single-sideband (SSB) modulation. Both OFSs employ stress-optic modulators (SOMs) based on the non-resonant piezoelectrical actuation of lead zirconate titanate (PZT) thin-films, deposited on top of the silicon nitride waveguides with a wafer-scale process. To improve the modulation bandwidth of the SOMs we investigate a novel configuration of the electrodes used for the actuation, where both electrodes are placed on top of the PZT layer. Using this top-top electrode configuration we report frequency shift of 100 kHz and 2.5 MHz, and suppression ratio of the unwanted sidebands of 22.1 dB and 39 dB, using the serrodyne and the SSB OFS, respectively. The best performing SOM structure induces 0.25π peak-to-peak sinusoidal phase-shift with 156 mW power dissipation at 2.5 MHz. We use the SSB-OFS in our compact LDV system to demonstrate vibration measurements in the kHz regime. The system comprises a dual-polarization coherent detector built in the PolyBoard platform, utilizing hybrid integration of InP photodiodes (PDs). High quality LDV performance with measurement of vibration frequencies up to several hundreds of kHz and displacement resolution of 10 pm are supported with our system.","PeriodicalId":93483,"journal":{"name":"PhotoniX","volume":"1 1","pages":"0"},"PeriodicalIF":15.7000,"publicationDate":"2023-09-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"PhotoniX","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1186/s43074-023-00105-4","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"OPTICS","Score":null,"Total":0}
引用次数: 0

Abstract

Abstract We demonstrate a compact heterodyne Laser Doppler Vibrometer (LDV) based on the realization of optical frequency shift in the silicon nitride photonic integration platform (TriPleX). We theoretically study, and experimentally evaluate two different photonic integrated optical frequency shifters (OFSs), utilizing serrodyne and single-sideband (SSB) modulation. Both OFSs employ stress-optic modulators (SOMs) based on the non-resonant piezoelectrical actuation of lead zirconate titanate (PZT) thin-films, deposited on top of the silicon nitride waveguides with a wafer-scale process. To improve the modulation bandwidth of the SOMs we investigate a novel configuration of the electrodes used for the actuation, where both electrodes are placed on top of the PZT layer. Using this top-top electrode configuration we report frequency shift of 100 kHz and 2.5 MHz, and suppression ratio of the unwanted sidebands of 22.1 dB and 39 dB, using the serrodyne and the SSB OFS, respectively. The best performing SOM structure induces 0.25π peak-to-peak sinusoidal phase-shift with 156 mW power dissipation at 2.5 MHz. We use the SSB-OFS in our compact LDV system to demonstrate vibration measurements in the kHz regime. The system comprises a dual-polarization coherent detector built in the PolyBoard platform, utilizing hybrid integration of InP photodiodes (PDs). High quality LDV performance with measurement of vibration frequencies up to several hundreds of kHz and displacement resolution of 10 pm are supported with our system.

Abstract Image

基于应力-光频移氮化硅的集成外差激光多普勒振动计
摘要设计了一种基于氮化硅光子集成平台(TriPleX)实现光频移的紧凑型外差激光多普勒测振仪(LDV)。我们从理论上研究和实验上评估了两种不同的光子集成光移频器(OFSs),分别采用了serrodyne和单边带(SSB)调制。两种ofs都采用应力光调制器(SOMs),该调制器基于锆钛酸铅(PZT)薄膜的非谐振压电驱动,通过晶圆级工艺沉积在氮化硅波导上。为了提高SOMs的调制带宽,我们研究了一种用于驱动的电极的新配置,其中两个电极都放置在PZT层的顶部。使用这种顶顶电极配置,我们报告了100 kHz和2.5 MHz的频移,以及使用serrodyne和SSB OFS分别抑制22.1 dB和39 dB的不需要边带的抑制比。性能最好的SOM结构在2.5 MHz下产生0.25π的峰对峰正弦相移,功耗为156 mW。我们在我们的紧凑型LDV系统中使用SSB-OFS来演示kHz范围内的振动测量。该系统包括一个内置在PolyBoard平台上的双偏振相干探测器,利用InP光电二极管(pd)的混合集成。我们的系统支持高质量的LDV性能,可测量高达数百kHz的振动频率和10 pm的位移分辨率。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
求助全文
约1分钟内获得全文 求助全文
来源期刊
CiteScore
25.70
自引率
0.00%
发文量
0
审稿时长
13 weeks
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信