Latest results from the Nikon NSR-S620 double patterning immersion scanner

Abstract

Double patterning (DP), an extension of immersion, is the leading contender for the manufacturing of 32 nm half pitch node devices. For DP, substantial improvement in overlay accuracy is required to meet the CDU requirements for the 32 nm node, and substantial increase in throughput is required to meet the cost requirements. To meet these challenges, Nikon introduced the NSR-S620. The S620 is based on the Streamlign platform, which is characterized by three innovations: Bird's Eye Control, Stream Alignment, and Modular2 Structure. In addition, many of the current systems and techniques have been refined to meet the requirements for DP. This presentation will discuss these technological improvements and show the latest technical results.