Porous silicon based heterostructures: formation, properties, and application

Abstract

The unique combination of perfect crystalline structure, developed surface, and high activity of porous silicon (PS) provides a real possibility for creation of different heterostuctures: GaAs/PS/Si, C/PS/Si, PbS/PS/Si, PS:Er/Si, Si/SiO/sub 2//Si. The heterostructures were used for CMOS/SOI IC's, light emitting and waveguiding components. PS was shown to provide integration of opto- and microelectronic components on Si wafer.