Genesis of ZnO nanolayers grown by ALD in micro channel plates

Abstract

In this work we investigated the possibility of applying the method of Atomic Layer Deposition to obtain thin films of zinc oxide deposited in narrow channels of micro channel plate. Calculations were carried out to find the optimum conditions for the synthesis. The resulting films have good continuity and uniformity. The electrical conductivity was studied on zinc oxide in the initial stages of growth on structures which we prepared.