Experimental analysis on SU8-micromolding structure of PDMS (poly-dimethylsiloxane) based microfluidic channel

Abstract

This paper reports experimental study of a microfluidic channel fabrication for bioparticles detection system. The microfluidic channel is fabricated by standard MEMS soft photolithography process implementing negative photoresist SU-8 and poly-dimethylsiloxane (PDMS). Based on the characterization process in the fabrication, an optimum structure of PDMS microfluidic has been achieved. A proper UV exposure dosage can be identified through the observation of the SU-8 mold film thickness and sidewalls profile produced in the characterization process. From this, UV expose for 60 s with exposure energy at 156 mJ/cm2 is considered as the optimal expose condition in this work. In addition, the difference between the PDMS microchannel pattern from the SU-8 mold are also observed. With these results, the produced structures can provide suitable channel formation for portable bioparticles detection purpose in lab on Chip applications.