Lateral junction waveguide type photodiode for membrane photonic circuits

Abstract

A lateral junction type photodiode grown on a semi-insulating InP substrate was realized by 3-step OMVPE growth. The responsivity of 0.27 A/W, 3 dB bandwidth of 6 GHz and 7.5 GHz at a bias voltage of 0 V and −2 V, respectively, were obtained for the stripe width of 1.4 µm and device length of 220µm. An error free transmissions up to 6 Gbps at 0 V were confirmed.