Millimeter-scale scanning MEMS mirror with sub-wavelength micro-hole arrays for terahertz wave scanning

2012 International Conference on Optical MEMS and Nanophotonics Pub Date : 2012-10-04 DOI:10.1109/OMEMS.2012.6318889

Hyeon-cheol Park, Jung-Hwan Lee, Sang-Gil Park, K. Jeong

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Abstract

Millimeter scale scanning MEMS mirror with sub-wavelength microhole arrays has been successfully demonstrated for terahertz wave scanning. Sub-wavelength microhole arrays provide both high reflectivity at THz waves and low air damping during the mirror scanning.

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用于太赫兹波扫描的亚波长微孔阵列毫米级扫描MEMS反射镜

亚波长微孔阵列的毫米级扫描MEMS反射镜已成功用于太赫兹波扫描。亚波长微孔阵列在太赫兹波下具有高反射率，并且在反射镜扫描过程中具有低空气阻尼。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2012 International Conference on Optical MEMS and Nanophotonics

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