PZT Based Acoustic Resonator for the Refractive Index Modulation

Abstract

We propose a PZT based acoustic resonator to modulate the refractive index of a Silicon waveguide. We use an inter-digital transducer (IDT) defined on the PZT film to create a standing acoustic wave resonance in the suspended device. We calculate the effective index change from the acousto-optic overlap integral and illustrate its dependency on the IDT pitch.