{"title":"A two-switch mode pulse modulator for plasma-based ion implantation and deposition","authors":"K. Yukimura, K. Matsunaga","doi":"10.1109/MODSYM.2002.1189536","DOIUrl":null,"url":null,"abstract":"A new-concept pulse modulator was developed for a plasma-based ion implantation (PBII) system, where two hard-tubes as a main switch are running in parallel to increase current capacity for outputting the pulse voltage and another two hard-tubes are used for releasing the charges stored in the stray and ion sheath-capacitor. A maximum output voltage is 40 kV with an average current of 20 A, where the pulse width is varied from 2 /spl mu/s to 100 /spl mu/s. The rise time less than 1 /spl mu/s at an output voltage of 40 kV and a maximum repetition rate of 2.5 kHz.","PeriodicalId":339166,"journal":{"name":"Conference Record of the Twenty-Fifth International Power Modulator Symposium, 2002 and 2002 High-Voltage Workshop.","volume":"412 3","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2002-06-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Conference Record of the Twenty-Fifth International Power Modulator Symposium, 2002 and 2002 High-Voltage Workshop.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MODSYM.2002.1189536","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 4
Abstract
A new-concept pulse modulator was developed for a plasma-based ion implantation (PBII) system, where two hard-tubes as a main switch are running in parallel to increase current capacity for outputting the pulse voltage and another two hard-tubes are used for releasing the charges stored in the stray and ion sheath-capacitor. A maximum output voltage is 40 kV with an average current of 20 A, where the pulse width is varied from 2 /spl mu/s to 100 /spl mu/s. The rise time less than 1 /spl mu/s at an output voltage of 40 kV and a maximum repetition rate of 2.5 kHz.