{"title":"Simple Al-Gate-Technology Yields High Bit-Density","authors":"G. Meusburger, Hermann Keller","doi":"10.1109/ESSCIRC.1976.5469237","DOIUrl":null,"url":null,"abstract":"A single-transistor memory cell in n-channel-Al-gate technology with 2.5 ¿m design rules will be described. Due to a novel design feature a bit density of 5720 bit/mm2 has been achieved.","PeriodicalId":378614,"journal":{"name":"ESSCIRC 76: 2nd European Solid State Circuits Conference","volume":"20 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1976-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"ESSCIRC 76: 2nd European Solid State Circuits Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ESSCIRC.1976.5469237","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
A single-transistor memory cell in n-channel-Al-gate technology with 2.5 ¿m design rules will be described. Due to a novel design feature a bit density of 5720 bit/mm2 has been achieved.