First results on the characterization of new semitransparent amorphous silicon sensors [position sensors]

Abstract

We present first results on the performance of a new generation of semitransparent amorphous silicon position detectors having very good properties such as a precision better than 5 /spl mu/m, deflection angles smaller than 10 /spl mu/rad and transmission in the visible higher than 70%. In addition the sensitive area is very large: 30/spl times/30 cm/sup 2/.