Simulation Study of Micromechanical Switches for AC Power Handling

Abstract

This paper presents the simulation study on electrostatically actuated micromechanical switch for AC power switching applications. An electrostatically actuated micromechanical switch is designed and simulated using Coventor MEMS+ and the actuation voltage is obtained. The switching action of the designed switch is also visualized. The designed micromechanical switch is interfaced with Cadence Virtuoso and the switching characteristics are obtained for 10 V and 0.17 A rating electrical system. The result shows that the designed switch can be used for AC power handling applications.