Broadband embedded substrate noise measurement for RF/Microwave ICs

Abstract

In this paper, a down conversion-based embedded substrate noise measurement up to 20 GHz is presented in detail. This on-chip measurement method utilizes a down conversion mixer and shows a measurement range from less than-60 dBm to greater than 2 dBm. Special test structures and measurement circuit were designed and fabricated in a BiCMOS 180nm-technology with a high-resistivity substrate. A semi-physical equivalent circuit model based on experimentally determined data is proposed and has been verified by embedded measurements. Error analysis will be reported later.