{"title":"Application of hydrogenated water to future cooling system","authors":"I. Yokoi, Y. Yamazaki, T. Abe, T. Ohmi","doi":"10.1109/ISSM.2000.993672","DOIUrl":null,"url":null,"abstract":"This study was carried on to contribute the application of hydrogenated water to a future cooling water system. In order to much improve cost of ownership (CoO) of cooling water, we firstly introduced hydrogenated city water to the cooling water system. Compared to a hydrogenated ultrapure water (H/sub 2/-UPW), it has a high pH value, resulting in it having a low oxidation-reduction potential (ORP) value so that it has the characteristics of flowing out suppression on even the surface of an iron pipeline. This application, based on control of pH and ORP value in water, is a candidate for future cooling water system to achieve initial and running cost reduction as well as ESH (environment, safety and health) promotion.","PeriodicalId":104122,"journal":{"name":"Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130)","volume":"23 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-09-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISSM.2000.993672","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
This study was carried on to contribute the application of hydrogenated water to a future cooling water system. In order to much improve cost of ownership (CoO) of cooling water, we firstly introduced hydrogenated city water to the cooling water system. Compared to a hydrogenated ultrapure water (H/sub 2/-UPW), it has a high pH value, resulting in it having a low oxidation-reduction potential (ORP) value so that it has the characteristics of flowing out suppression on even the surface of an iron pipeline. This application, based on control of pH and ORP value in water, is a candidate for future cooling water system to achieve initial and running cost reduction as well as ESH (environment, safety and health) promotion.