Status Quo and Developing Trend of MEMS-Gyroscope Technology

Abstract

With the rapid development of MEMS technology, MEMS-gyroscopes with its perfect characteristics of small size, light weight, low cost and environmental adaptability are getting a wild rang application including both civilian and military fields. At first, this paper introduces how the MEMS-gyroscope works from the basic mechanics, the internal structure and performance analysis of basic characteristics. And then the paper presents and analyzes the current status of the development of MEMS gyroscope technology. And based three different market conditions and working environments, the applications of MEMS gyroscopes are discussed in this paper. Finally, the developing trends of MEMS gyroscopes are analyzed from the technological and market perspectives.