Direct Modulation of 16-ch Two-Dimensionally Arrayed Membrane Lasers on Si

Abstract

We fabricated a 16-ch membrane laser array on a Si chip with a small footprint of 1.11 $\times 2.75\text{mm}^{2}$. Optical output ports are placed on a front facet via SiOx waveguides. All lasers exhibit 32-Gbit/s direct modulation with a current of 17 mA.