Microstructures and visible photoluminescence of excimer laser crystallized a-Si:H/a-SiN/sub x/:H multi-quantum wells

Abstract

We report the visible photoluminescence (PL) at room temperature from KrF excimer laser annealed a-Si:H/a-SiN/sub x/:H multi-quantum wells (MQWs). X-ray diffraction (XRD) and Raman scattering spectra demonstrate the microstructures of crystallized silicon within the MQWs and the crystallinity which can be controlled by excimer laser energy density. The wavelength of PL peak is around 640 nm and does not shift significantly with excimer laser energy.