A wide range 60 GHz VCO using back-gate controlled varactor in 22 nm FDSOI technology

Abstract

This paper presents a 60 GHz, 34% tuning range mm-wave voltage-controlled oscillator (VCO). The VCO is fabricated in GLOBALFOUDRIES 22 nm FDSOI (22FDXTM) process. Switched capacitor based tuning array covers frequency range from 51 GHz to 72 GHz. A novel back-gate controlled varactor is used to achieve a low Kv of 680 MHz at 57 GHz carrier frequency. The power dissipation of VCO core is 7.5 mW from a 0.7 V supply when it operates at 60 GHz. The phase noise at 60 GHz carrier frequency is −84 dBc/Hz and −109 dBc/Hz, at 1MHz and 10MHz offset frequency, respectively.