A high-performance dipole surface drive for large travel and force

Abstract

We report unparalleled travel, force, precision and repeatability with an electrostatically actuated dipole surface drive. We have successfully demonstrated motors that generate several hundred micronewtons while traveling 50 microns at 60 V. Without external feedback control, the motors can be positioned with nanometer resolution and repeatability. The manufacture of these motors uses a two-level polysilicon deposition, a wafer bond and two anisotropic deep silicon etches.