Microactuated optical MEMS (Abstract Only)

Design, Test, Integration, and Packaging of MEMS/MOEMS Pub Date : 2000-04-10 DOI:10.1117/12.382261

H. Fujita

引用次数: 0

Abstract

Optical scanners and switches are presented as examples of microactuated optical devices. Also a 3D chip-level packaging technique that is capable of optical, mechanical and electronic connections is discussed.

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微驱动光学MEMS(仅摘要)

光学扫描仪和开关是微驱动光学器件的例子。此外，还讨论了一种能够实现光学、机械和电子连接的三维芯片级封装技术。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Design, Test, Integration, and Packaging of MEMS/MOEMS

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