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Efficient 3d Simulation Of Complex Structures

Workshop on Numerical Modeling of Processes and Devices for Integrated Circuits Pub Date : 1900-01-01 DOI:10.1109/NUPAD.1990.748256
P. Ciampolini, A. Pierantoni, G. Baccarani
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复杂结构的高效三维模拟
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Workshop on Numerical Modeling of Processes and Devices for Integrated Circuits
Workshop on Numerical Modeling of Processes and Devices for Integrated Circuits
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