J. Greer
{"title":"High Speed Deposition of Al2O3 and Y2O3 for CC Applications","authors":"J. Greer","doi":"10.14332/svc22.proc.0034","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":305525,"journal":{"name":"65th Annual Technical Conference Proceedings","volume":"49 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-11-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"65th Annual Technical Conference Proceedings","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.14332/svc22.proc.0034","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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