A miniaturized Orbitron pump for vacuum nanoelectronics

2007 IEEE 20th International Vacuum Nanoelectronics Conference Pub Date : 2007-07-08 DOI:10.1109/IVNC.2007.4481003

H. Koops

引用次数: 0

Abstract

The principle of the Orbitron pump is described. Its miniaturization is simulated. The application of such an UHV pump is based on the availability of electron sources with good resistance against low vacuum levels.

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用于真空纳米电子学的小型化轨道子泵

介绍了轨道泵的工作原理。对其微型化进行了模拟。这种特高压泵的应用是基于对低真空水平具有良好电阻的电子源的可用性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2007 IEEE 20th International Vacuum Nanoelectronics Conference

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