{"title":"Ionizing radiation response of an amorphous silicon based antifuse","authors":"J. Benedetto, C. Hafer","doi":"10.1109/REDW.1997.629806","DOIUrl":null,"url":null,"abstract":"The ionizing radiation response of Ti/W metal electrode amorphous silicon (/spl alpha/-Si) antifuses is examined. It is shown that the resistance of unprogrammed /spl alpha/-Si antifuses improve (i.e. increase resistance) with increasing radiation dose when irradiated with a positive 3 or 5 V bias. The resistance of unprogrammed /spl alpha/-Si antifuses irradiated with zero bias and the resistance of fully programmed antifuses are insensitive to total ionizing radiation dose. The radiation response of partially programmed antifuses (as programmed resistances between 2000 and 4000 /spl Omega/) is also examined.","PeriodicalId":328522,"journal":{"name":"1997 IEEE Radiation Effects Data Workshop NSREC Snowmass 1997. Workshop Record Held in conjunction with IEEE Nuclear and Space Radiation Effects Conference","volume":"20 5 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1997-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"1997 IEEE Radiation Effects Data Workshop NSREC Snowmass 1997. Workshop Record Held in conjunction with IEEE Nuclear and Space Radiation Effects Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/REDW.1997.629806","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
The ionizing radiation response of Ti/W metal electrode amorphous silicon (/spl alpha/-Si) antifuses is examined. It is shown that the resistance of unprogrammed /spl alpha/-Si antifuses improve (i.e. increase resistance) with increasing radiation dose when irradiated with a positive 3 or 5 V bias. The resistance of unprogrammed /spl alpha/-Si antifuses irradiated with zero bias and the resistance of fully programmed antifuses are insensitive to total ionizing radiation dose. The radiation response of partially programmed antifuses (as programmed resistances between 2000 and 4000 /spl Omega/) is also examined.