Wafer-scale silica optomechanical oscillators with low threshold power and low phase noise for monolithic optical frequency references

Abstract

We present wafer-scale processed optomechanical oscillators with low threshold power (<;120μW) owing to high Q_optical = 5.3M, with phase noise of -110dBc/Hz (10kHz offset, 18.6MHz carrier). Phase noise is modeled, and measured vs. Q_optical and Qmechanical.