An Advanced Fault Detection Method for Post-CMP Brush Scrubbers

Abstract

We have developed an advanced fault detection method for post-Chemical Mechanical Polisher (CMP) scrubbers to detect actual rotation statuses. We have found out a relationship between rotation statuses and motor torques by theoretical consideration. We have verified the consideration by measuring the motor torques of two types of mass-production brush scrubbers, roller and pencil brush scrubbers. We are quite confident our method is effective to enhance productivity of the scrubbers.