A model of the electric field in a one-dimensional Micro-Mirror Array and electromechanical simulations and optimization in a single cell

Abstract

This paper reports recent progress in modeling and simulation of a one-dimensional Micro-Mirror Array actuated by an electrostatic force. We present results obtained through numerical simulations of a single cell: the analysis and the optimization of the pull-in voltage and the analysis of the bounces of the mirror in contact with the base when it is subjected to a voltage exceeding the pull-in voltage. For the array, a model has been derived for the electrostatic field using a multi-scale modeling technique. The model is detailed together with simulation results.