Infrared optical and electronic properties in low tellurium doped GaSb substrates for SLS FPA applications

K. Roodenko, P. Liao, D. Lan, K. Clark, E. Fraser, K. Vargason, J. Kuo, Y. Kao, P. Pinsukanjana
{"title":"Infrared optical and electronic properties in low tellurium doped GaSb substrates for SLS FPA applications","authors":"K. Roodenko, P. Liao, D. Lan, K. Clark, E. Fraser, K. Vargason, J. Kuo, Y. Kao, P. Pinsukanjana","doi":"10.1117/12.2234694","DOIUrl":null,"url":null,"abstract":"Epi-ready GaSb wafers with low absorption coefficients are of a special interest as substrates for molecular beam epitaxy (MBE) growth of material for IR focal plane arrays that operate under back-side illumination configuration, when the substrate is not completely removed. While low absorption coefficient across a broad IR spectral range (~2um-20um) is achievable in GaSb crystals with low Te doping, the control of the doping distribution across the wafers is especially challenging in the mass-production of optically transparent, high-resistivity Te-doped GaSb wafers. In this work, we examine data from the n-type and p-type Te-doped GaSb samples with doping concentration below 1e18 cm-3. The carrier concentration measured by the Hall and the transmission data measured by FTIR spectroscopy are correlated. We perform a rigorous analysis of the absorption coefficient based on the free-carrier absorption mechanism that is dominant for the n-type GaSb and the inter-valence band absorption due to the transitions from the light-hole to the heavy-hole band that is the dominant absorption mechanism for the p-type GaSb. Based on the correlation between the Hall and the FTIR data, carrier concentration profile can be estimated from the non-destructive FTIR transmission mapping of the wafer.","PeriodicalId":299313,"journal":{"name":"SPIE Commercial + Scientific Sensing and Imaging","volume":"22 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-05-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"SPIE Commercial + Scientific Sensing and Imaging","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2234694","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2

Abstract

Epi-ready GaSb wafers with low absorption coefficients are of a special interest as substrates for molecular beam epitaxy (MBE) growth of material for IR focal plane arrays that operate under back-side illumination configuration, when the substrate is not completely removed. While low absorption coefficient across a broad IR spectral range (~2um-20um) is achievable in GaSb crystals with low Te doping, the control of the doping distribution across the wafers is especially challenging in the mass-production of optically transparent, high-resistivity Te-doped GaSb wafers. In this work, we examine data from the n-type and p-type Te-doped GaSb samples with doping concentration below 1e18 cm-3. The carrier concentration measured by the Hall and the transmission data measured by FTIR spectroscopy are correlated. We perform a rigorous analysis of the absorption coefficient based on the free-carrier absorption mechanism that is dominant for the n-type GaSb and the inter-valence band absorption due to the transitions from the light-hole to the heavy-hole band that is the dominant absorption mechanism for the p-type GaSb. Based on the correlation between the Hall and the FTIR data, carrier concentration profile can be estimated from the non-destructive FTIR transmission mapping of the wafer.
用于SLS FPA的低碲掺杂GaSb衬底的红外光学和电子特性
当衬底未完全去除时,具有低吸收系数的外延制备的GaSb晶圆是在背面照明配置下运行的红外焦平面阵列材料的分子束外延(MBE)生长的衬底。虽然在低Te掺杂的GaSb晶体中可以实现宽红外光谱范围(~ 2m -20um)的低吸收系数,但在大规模生产光学透明、高电阻率Te掺杂的GaSb晶圆中,控制晶圆上的掺杂分布尤其具有挑战性。在这项工作中,我们研究了掺杂浓度低于1e18 cm-3的n型和p型te掺杂GaSb样品的数据。霍尔测量的载流子浓度与FTIR光谱测量的透射率数据具有相关性。我们根据n型GaSb的主要吸收机制——自由载流子吸收机制和p型GaSb的主要吸收机制——由轻空穴到重空穴的过渡引起的价间带吸收机制,对其吸收系数进行了严格的分析。基于霍尔和FTIR数据之间的相关性,可以从晶圆片的非破坏性FTIR透射映射中估计载流子浓度分布。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
求助全文
约1分钟内获得全文 求助全文
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信