Highly sensitive, flexible, force sensors based on short channel devices

Abstract

In this manuscript we report about a novel concept for the fabrication of highly sensitive, flexible force sensors. The proposed devices have been fabricated on a flexible plastic substrates, using an Organic Charge Modulated Field Effect Transistor configuration. The transistor-based sensor is characterized by a floating gate coupled with a Piezoelectric material, namely PVDF. The main step forward in this work consists of the employment of short channel OTFT, fabricated by means of an easy, up-scalable and highly reproducible process, allowing to achieve a much higher sensitivity of the final device. Such an approach could be useful for all those applications in which high device density and high sensor sensitivity is required.