A comparative study of the carrier distributions in dynamically operating GTO's by means of two optically probed measurement methods

H. Bleichner, M. Rosling, J. Vobecký, M. Lundqvist, E. Nordlander
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引用次数: 6

Abstract

Two optical scanning techniques are employed for the measurement of local carrier concentration in power devices. 3-D type maps of two-dimensional carrier distri- butions are produced. The time resolution of the instruments facilitates measurements of the transient phases of device operation. The instruments are well suited for the characte- rization of any device, ranging from simple diodes to GTO:s, provided that the samples are small in geometry, and properly prepar- ed. This investigation compares the methods as regards differences in detection principles, sensitivity, and applicability.
用两种光学探针测量方法对动态运行GTO的载流子分布进行了比较研究
采用两种光学扫描技术测量功率器件中的局部载流子浓度。生成了二维载流子分布的三维图。仪器的时间分辨率便于测量设备运行的瞬态阶段。这些仪器非常适合于任何器件的表征,从简单的二极管到GTO:s,只要样品的几何形状小,并且制备得当。本研究比较了这些方法在检测原理、灵敏度和适用性方面的差异。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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