Study On High Frequency Permeability Of Magnetic Multilayer Films

Abstract

This article reports on the material design of low loss and high loss magnetic films for micromagnetic device applications, A multilayer film, composed of soft-magnetic alloy layers and nonmagnetic insulator layers, was adopted as an appropriate material form. The high-frequency magnetic properties were optimized by controlling the thickness of each layer and the magnetic anisotropy with respect to the eddycurrent skin effect, ferromagnetic resonance and dielectric breakdown. A constant relative permeability of 300 in the 1-1000 MHz range and a large common mode noise filtering effect were achieved in optimized low loss and high loss CoZrNb/Si02 films, respectively.